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Onto Innovation Completes Rigaku Acquisition for

Rigaku acquired by Onto Innovation

Acquisition$710,000,000Technology, Information and MediaJP

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Acquired

Rigaku

JapanTechnology, Information and Media

Deal value

$710,000,000

April 21, 2026

Onto Innovation logo
Acquirer

Onto Innovation

Semiconductor Manufacturing

Onto Innovation has acquired Rigaku, a global leader in analytical and industrial instrumentation technology, for $710.0 million. This corporate acquisition sees Onto Innovation taking ownership of Rigaku, a company renowned for its extensive expertise in X-ray and complementary technologies since its inception in 1951. The transaction marks a significant strategic move in the advanced instrumentation sector.

Rigaku has established itself with hundreds of major innovations across fields such as general X-ray diffraction (XRD), thin film analysis, X-ray fluorescence spectrometry, and semiconductor metrology. Its solutions are critical for universities, industry, and government labs, supporting advancements in structural proteomics, nanoengineering research, materials analysis, and quality assurance. Rigaku's products are instrumental in areas like creating better semiconductor chips, enabling drug discovery, and improving production line quality, supported by over 1,400 employees worldwide.

The acquisition is strategically aimed at leveraging Rigaku's deep understanding of X-ray and analytical instrumentation to enhance Onto Innovation's market offerings. Rigaku's advanced metrology and analysis capabilities, particularly in semiconductor and materials science, are expected to complement Onto Innovation's existing portfolio, enabling the combined entity to deliver more comprehensive and integrated solutions. This synergy is anticipated to strengthen their position in high-growth markets requiring precision measurement and analysis.

Looking ahead, the integration of Rigaku's innovative technologies and customer-focused approach with Onto Innovation is poised to create a more robust and diversified enterprise. The combined entity is expected to accelerate innovation, expand its global reach, and provide an unparalleled suite of tools and services to clients across various scientific and industrial disciplines, driving progress in critical technological frontiers.

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