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Rigaku Acquires Onto Innovation to Strengthen Semiconductor Portfolio

Onto Innovation acquired by Rigaku

AcquisitionManufacturingUS

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Onto Innovation logo
Acquired

Onto Innovation

United StatesManufacturing

Undisclosed amount

April 21, 2026

Rigaku logo
Acquirer

Rigaku

Appliances, Electrical, and Electronics Manufacturing

Rigaku has acquired Onto Innovation, a prominent leader in process control solutions for the semiconductor industry, for an undisclosed amount. This corporate acquisition sees Rigaku taking ownership of Onto Innovation, which specializes in a broad portfolio of leading-edge technologies designed to optimize semiconductor manufacturing processes.

Onto Innovation, headquartered in Wilmington, Massachusetts, is known for its global scale and comprehensive offerings. Its technologies include un-patterned wafer quality assessment, 3D metrology spanning chip features from nanometer scale transistors to large die interconnects, macro defect inspection of wafers and packages, metal interconnect composition analysis, factory analytics, and lithography for advanced semiconductor packaging. These solutions are critical for customers seeking to resolve complex yield, device performance, quality, and reliability issues across the entire semiconductor value chain.

The acquisition is strategically significant, allowing Rigaku to integrate Onto Innovation's advanced process control and metrology capabilities. This move is expected to enhance Rigaku's market position within the semiconductor equipment sector by expanding its technological breadth and customer reach. The synergy between the two entities is anticipated to create a more comprehensive offering for semiconductor manufacturers, addressing their critical path of progress by making operations smarter, faster, and more efficient.

The combined entity is poised to leverage Onto Innovation's expertise in critical manufacturing stages with Rigaku's existing strengths. This integration aims to drive further innovation in semiconductor production, enabling customers to tackle increasingly complex challenges in device fabrication and performance.

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