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ASM Acquires Axus Technology, Expanding Semiconductor

Axus Technology acquired by ASM

AcquisitionManufacturingUS

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Acquired

Axus Technology

United StatesManufacturing

Undisclosed amount

March 5, 2026

ASM logo
Acquirer

ASM

Manufacturing

ASM has acquired Axus Technology for an undisclosed amount, marking a significant expansion in the semiconductor equipment sector. Axus Technology is known for delivering advanced process development expertise, equipment, and service support across critical areas such as CMP & Polishing, Wafer Thinning and Grinding, Edge Grinding and Profline, Substrate Cleaning Applications, and Wafer Bonding Applications. Its customer base spans from leading-edge production semiconductor manufacturers to small development facilities, providing surface processing solutions for a broad range of technologies including MEMs, device packaging, TSV/3D Integration, and materials processing.

This acquisition is strategically aimed at enhancing ASM's portfolio by integrating Axus's specialized capabilities in making materials flatter, smoother, or thinner. Axus Technology supports a global customer base with high-quality, often highly customized, processes and equipment, working with a broad array of substrates and films. This expertise is expected to complement ASM's existing offerings, allowing for a more comprehensive suite of solutions for the evolving demands of semiconductor manufacturing and advanced materials processing.

The integration of Axus Technology's team and its fundamental and novel process technologies into ASM is anticipated to generate substantial synergies. ASM will gain access to Axus's deep process development knowledge and its established global customer support experience. This move is set to strengthen ASM's market position by expanding its reach into specialized surface processing applications, thereby offering enhanced value to customers seeking advanced material processing solutions. The combined entity is poised to deliver a more robust and diversified offering to the global semiconductor industry, addressing complex manufacturing challenges and supporting future technological advancements.

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